alignment mark

英 [əˈlaɪnmənt mɑːk]

美 [əˈlaɪnmənt mɑːrk]

网络对准标记; 对准记号; 定位标记; 定位记号; 对齐标记

The phase sub-gratings are arranged to form an alignment mark.
该对准系统所用的标记包含多个相位子光栅。
Alignment System with Multi-Grating Mark for Lithographic Apparatus
用于光刻装置的多光栅标记对准系统
Developed Sub-pixel Fine Positioning Algorithm for Image Processing of Alignment Mark
对准标记处理的改进亚象素细分定位算法
Analysis of Alignment Mark Device in Packing Machine
包装机械对标装置的分析
When a fiducial mark on the wafer stage or a mark on the wafer is positioned directly under the off-axis alignment center, the coordinates of the mark can be obtained.
当工作台上的基准标记或硅片上的标记运行到离轴对准系统测量光束下面时，用系统扫描可以测量出标记的坐标值。
So it is difficult for the critical layer align accurately. The thesis study wafer alignment theory and improve the alignment exactness by change alignment mode and improve alignment mark quality. 2.
因此给某些关键的层之间对准带来了困难，本文通过对对准原理的研究，从对准方式和提高对准标记质量的方法大大提高了产品的对准精度。